Publications Details

Determination of the photoelastic constants of silicon nitride using piezo-optomechanical photonic integrated circuits and laser Doppler vibrometry

Koppa, Matthew A.; Storey, Matthew J.; Dong, Mark; Heim, David; Leenheer, Andrew J.; Zimmermann, Matthew; Laros, James H.; Gilbert, Gerald; Englund, Dirk; Eichenfield, Matthew S.

We measure the photoelastic constants of piezo-optomechanical photonic integrated circuits incorporating a specially formulated, silicon-depleted silicon nitride thin films using a laser doppler vibrometer to calibrate the strain produced by the integrated piezoelectric actuators.