Publications Details
All-epitaxial resonant cavity enhanced long-wave infrared detectors for focal plane arrays
Petluru, P.; Muhowski, Aaron J.; Kamboj, A.; Mansfield, N.C.; Bergthold, M.; Shaner, Eric A.; Klem, John F.; Wasserman, D.
We demonstrate a monolithic all-epitaxial resonant-cavity architecture for long-wave infrared photodetectors with substrate-side illumination. An nBn detector with an ultra-thin (t ≈ 350 nm) absorber layer is integrated into a leaky resonant cavity, formed using semi-transparent highly doped (n + +) epitaxial layers, and aligned to the anti-node of the cavity's standing wave. The devices are characterized electrically and optically and demonstrate an external quantum efficiency of ∼25% at T = 180 K in an architecture compatible with focal plane array configurations.