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A heterogeneously integrated silicon photonic/lithium niobate platform for RF photonics

Boynton, Nicholas; Cai, Hong; Gehl, M.; Arterburn, Shawn C.; Dallo, Christina M.; Pomerene, Andrew P.; Starbuck, Andrew L.; Hood, Dana; Trotter, Douglas C.; Friedmann, Thomas A.; Derose, Christopher T.; Lentine, Anthony L.

We present a 30 GHz heterogeneously integrated silicon photonic/lithium niobate Mach-Zehnder modulator simultaneously utilizing the strong Pockels effect in LiNbO3 while also taking advantage of the ability for photonic/electronic integration and mass production associated with silicon photonics. Aside from the final step of bonding the LiNbO3, this modulator can be entirely fabricated using CMOS facilities.