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Stress accommodation in nanoscale dolan bridges designed for superconducting qubits

Superconductivity

Del Skinner-Ramos, Suelicarmen; Freeman, Matthew L.; Pete, Douglas V.; Lewis, Rupert M.; Harris, Charles T.; Eichenfield, Matthew

Josephson junctions are the principal circuit element in numerous superconducting quantum information devices and can be readily integrated into large-scale electronics. However, device integration at the wafer scale necessarily depends on having a reliable, high-fidelity, and high-yield fabrication method for creating Josephson junctions. When creating Al/AlOx based superconducting qubits, the standard Josephson junction fabrication method relies on a sub-micron suspended resist bridge, known as a Dolan bridge, which tends to be particularly fragile and can often times fracture during the resist development process, ultimately resulting in device failure. In this work, we demonstrate a unique Josephson junction lithography mask design that incorporates stress-relief channels. Our simulation results show that the addition of stress-relief channels reduces the lateral stress in the Dolan bridge by more than 70% for all the bridge geometries investigated. In practice, our novel mask design significantly increased the survivability of the bridge during device processing, resulting in 100% yield for over 100 Josephson junctions fabricated.

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Quantum Sensing using a Qubit for the Detection of Ionizing Radiation

Proceedings of SPIE - The International Society for Optical Engineering

Freeman, Matthew L.; Del Skinner-Ramos, Suelicarmen; Lewis, Rupert M.; Carr, Stephen M.

Quantum sensing utilizes the inherent sensitivity of a quantum system to external stimuli. Our goal is to leverage this sensitivity to develop a quantum sensor designed for the detection of ionizing radiation. Here we report on the design, fabrication, and measurement of a new quantum device for hard x-ray and gamma-ray detection. Our quantum device is based on a superconducting quantum bit (qubit) with superconducting tunnel junctions as the core device elements. We describe our experimental investigation directed toward the detection metrics of energy resolution, dynamic range, and active area. In contrast to existing superconducting detectors, the active area per qubit may be much larger than the physical area of the tunnel junctions or the physical area of the qubit device, due to the sensitivity of quantum coherence to ionizing radiation deposition within a radius on the millimeter or centimeter scale. Our experimental design enables an ionizing radiation source at room temperature to be detected by our quantum sensor at low temperature.

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Quantum Sensing using a Qubit for the Detection of Ionizing Radiation

Proceedings of SPIE - The International Society for Optical Engineering

Freeman, Matthew L.; Del Skinner-Ramos, Suelicarmen; Lewis, Rupert M.; Carr, Stephen M.

Quantum sensing utilizes the inherent sensitivity of a quantum system to external stimuli. Our goal is to leverage this sensitivity to develop a quantum sensor designed for the detection of ionizing radiation. Here we report on the design, fabrication, and measurement of a new quantum device for hard x-ray and gamma-ray detection. Our quantum device is based on a superconducting quantum bit (qubit) with superconducting tunnel junctions as the core device elements. We describe our experimental investigation directed toward the detection metrics of energy resolution, dynamic range, and active area. In contrast to existing superconducting detectors, the active area per qubit may be much larger than the physical area of the tunnel junctions or the physical area of the qubit device, due to the sensitivity of quantum coherence to ionizing radiation deposition within a radius on the millimeter or centimeter scale. Our experimental design enables an ionizing radiation source at room temperature to be detected by our quantum sensor at low temperature.

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