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Damage of MEMS thermal actuators heated by laser irradiation

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Phinney, Leslie M.; Rhodes, Kelly A.; Sackos, John T.; Walraven, J.A.

Optical actuation of microelectromechanical systems (MEMS) is advantageous for applications for which electrical isolation is desired. Thirty-two polycrystalline silicon opto-thermal actuators, optically-powered MEMS thermal actuators, were designed, fabricated, and tested. The design of the opto-thermal actuators consists of a target for laser illumination suspended between angled legs that expand when heated, providing the displacement and force output. While the amount of displacement observed for the opto-thermal actuators was fairly uniform for the actuators, the amount of damage resulting from the laser heating ranged from essentially no damage to significant amounts of damage on the target. The likelihood of damage depended on the target design with two of the four target designs being more susceptible to damage. Failure analysis of damaged targets revealed the extent and depth of the damage.

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Damage of MEMS thermal actuators heated by laser irradiation

Rhodes, Kelly A.; Sackos, John T.; Walraven, J.A.

Optical actuation of microelectromechanical systems (MEMS) is advantageous for applications for which electrical isolation is desired. Thirty-two polycrystalline silicon opto-thermal actuators, optically-powered MEMS thermal actuators, were designed, fabricated, and tested. The design of the opto-thermal actuators consists of a target for laser illumination suspended between angled legs that expand when heated, providing the displacement and force output. While the amount of displacement observed for the opto-thermal actuators was fairly uniform for the actuators, the amount of damage resulting from the laser heating ranged from essentially no damage to significant amounts of damage on the target. The likelihood of damage depended on the target design with two of the four target designs being more susceptible to damage. Failure analysis of damaged targets revealed the extent and depth of the damage.

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A low-cost, high-resolution, video-rate imaging optical radar

Proceedings of SPIE - The International Society for Optical Engineering

Sackos, John T.

Sandia National Laboratories has developed a unique type of portable low-cost range imaging optical radar (laser radar or LADAR). This innovative sensor is comprised of an active floodlight scene illuminator and an image intensified CCD camera receiver. It is a solid-state device (no moving parts) that offers significant size, performance, reliability, and simplicity advantages over other types of 3-D imaging sensors. This unique flash LADAR is based on low cost, commercially available hardware, and is well suited for many government and commercial uses. This paper presents an update of Sandia's development of the Scannerless Range Imager technology and applications, and discusses the progress that has been made in evolving the sensor into a compact, low, cost, high-resolution, video rate Laser Dynamic Range Imager.

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Scannerless terrain mapper

Sackos, John T.

NASA-Ames Research Center, in collaboration with Sandia National Laboratories, is developing a Scannerless Terrain Mapper (STM) for autonomous vehicle guidance through the use of virtual reality. The STM sensor is based on an innovative imaging optical radar technology that is being developed by Sandia National Laboratories. The sensor uses active flood-light scene illumination and an image intensified CCD camera receiver to rapidly produce and record very high quality range imagery of observed scenes. The STM is an all solid-state device (containing no moving parts) and offers significant size, performance, reliability, simplicity, and affordability advantages over other types of 3-D sensor technologies, such as scanned laser radar, stereo vision, and structured lighting. The sensor is based on low cost, commercially available hardware, and is very well suited for affordable application to a wide variety of military and commercial uses, including: munition guidance, target recognition, robotic vision, automated inspection, driver enhanced vision, collision avoidance, site security and monitoring, and facility surveying. This paper reviews the sensor technology, discusses NASA`s terrain mapping applications, and presents results from the initial testing of the sensor at NASA`s planetary landscape simulator.

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The emerging versatility of a scannerless range imager

Sackos, John T.

Sandia National Laboratories is nearing the completion of the initial development of a unique type of range imaging sensor. This innovative imaging optical radar is based on an active flood-light scene illuminator and an image intensified CCD camera receiver. It is an all solid-state device (no moving parts) and offers significant size, performance, reliability, simplicity, and affordability advantages over other types of 3-D sensor technologies, including: scanned laser radar, stereo vision, and structured lighting. The sensor is based on low cost, commercially available hardware, and is very well suited for affordable application to a wide variety of military and commercial uses, including: munition guidance, target recognition, robotic vision, automated inspection, driver enhanced vision, collision avoidance, site security and monitoring, terrain mapping, and facility surveying. This paper reviews the sensor technology and its development for the advanced conventional munition guidance application, and discusses a few of the many other emerging applications for this new innovative sensor technology.

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7 Results
7 Results