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Atomic step disorder on polycrystalline surfaces leads to spatially inhomogeneous work functions

Journal of Vacuum Science and Technology A

Bussmann, Ezra B.; smith, sean w.; Scrymgeour, David S.; Brumbach, Michael T.; Lu, Ping L.; Dickens, Sara D.; Michael, Joseph R.; Ohta, Taisuke O.; Hjalmarson, Harold P.; Schultz, Peter A.; Clem, Paul G.; Hopkins, Matthew M.; Moore, Christopher M.

Structural disorder causes materials’ surface electronic properties, e.g., work function ([Formula: see text]), to vary spatially, yet it is challenging to prove exact causal relationships to underlying ensemble disorder, e.g., roughness or granularity. For polycrystalline Pt, nanoscale resolution photoemission threshold mapping reveals a spatially varying [Formula: see text] eV over a distribution of (111) vicinal grain surfaces prepared by sputter deposition and annealing. With regard to field emission and related phenomena, e.g., vacuum arc initiation, a salient feature of the [Formula: see text] distribution is that it is skewed with a long tail to values down to 5.4 eV, i.e., far below the mean, which is exponentially impactful to field emission via the Fowler–Nordheim relation. We show that the [Formula: see text] spatial variation and distribution can be explained by ensemble variations of granular tilts and surface slopes via a Smoluchowski smoothing model wherein local [Formula: see text] variations result from spatially varying densities of electric dipole moments, intrinsic to atomic steps, that locally modify [Formula: see text]. Atomic step-terrace structure is confirmed with scanning tunneling microscopy (STM) at several locations on our surfaces, and prior works showed STM evidence for atomic step dipoles at various metal surfaces. From our model, we find an atomic step edge dipole [Formula: see text] D/edge atom, which is comparable to values reported in studies that utilized other methods and materials. Our results elucidate a connection between macroscopic [Formula: see text] and the nanostructure that may contribute to the spread of reported [Formula: see text] for Pt and other surfaces and may be useful toward more complete descriptions of polycrystalline metals in the models of field emission and other related vacuum electronics phenomena, e.g., arc initiation.

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On-Wafer Microfabricated Test Structures for Characterizing RF Breakdown in Narrow Gaps

Proceedings of the 2021 IEEE Texas Symposium on Wireless and Microwave Circuits and Systems: Making Waves in Texas, WMCS 2021

Ruyack, Alexander R.; Jordan, Matthew J.; Moore, Christopher M.; Hummel, Gwendolyn H.; Herrera, Sergio A.; Ballance, Mark H.; Bingham, Andrew J.; Schiess, Adrian R.; Gibson, Christopher B.; Nordquist, Christopher N.

Plasmas formed in microscale gaps at DC and plasmas formed at radiofrequency (RF) both deviate in behavior compared to the classical Paschen curve, requiring lower voltage to achieve breakdown due to unique processes and dynamics, such as field emission and controlled rates of electron/ion interactions. Both regimes have been investigated independently, using high precision electrode positioning systems for microscale gaps or large, bulky emitters for RF. However, no comprehensive study of the synergistic phenomenon between the two exists. The behavior in such a combined system has the potential to reach sub-10 V breakdown, which combined with the unique electrical properties of microscale plasmas could enable a new class of RF switches, limiters and tuners.This work describes the design and fabrication of novel on-wafer microplasma devices with gaps as small as 100 nm to be operated at GHz frequencies. We used a dual-sacrificial layer process to create devices with microplasma gaps integrated into RF compatible 50 Ω coplanar waveguide transmission lines, which will allow this coupled behaviour to be studied for the first time. These devices are modelled using conventional RF simulations as well as the Sandia code, EMPIRE, which is capable of modelling the breakdown and formation of plasma in microscale gaps driven by high frequencies. Synchronous evaluation of the modelled electrical and breakdown behaviour is used to define device structures, predict behaviour and corroborate results. We further report preliminary independent testing of the microscale gap and RF behaviour. DC testing shows modified-Paschen curve behaviour for plasma gaps at and below four microns, demonstrating decreased breakdown voltage with reduced gap size. Additionally, preliminary S-parameter measurements of as-prepared and connectorized devices have elucidated RF device behaviour. Together, these results provide baseline data that enables future experiments as well as discussion of projected performance and applications for these unique devices.

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7 Results
7 Results