Publications Details
Thermochemical Analysis for Purification of Polysilicon Melts
Chemical Equilibrium calculations are presented that are relevant to the purification of molten silicon by gas-blowing. The equilibrium distributions of silicon, boron, phosphorus carbon and iron among the solid, liquid and gas phases are reported for a variety of added chemicals, temperatures and total pressures. The identities of the dominant chemical species for each element in each phase are also provided for these conditions. The added gases examined are O(2), air, water, wet air, HCl, Cl(2), Cl(2)/O(2), SiCl(4), NH(3), NH(4)OH, and NH(4)Cl. These calculations suggest possible purification schemes, although kinetic or transport limitations may prove to be significant