Publications Details
Sputter Deposition of Al3Sc Films for Microelectronics Fabrication
Esteves, Giovanni; Bischoff, Joseph; Young, Travis R.; Schmidt, Ethan; Henry, David; Rodriguez, Mark A.; Kotula, Paul G.
Abstract not provided.
Esteves, Giovanni; Bischoff, Joseph; Young, Travis R.; Schmidt, Ethan; Henry, David; Rodriguez, Mark A.; Kotula, Paul G.
Abstract not provided.