Publications Details

Simulation of moving microbeams with the direct simulation Monte Carlo method

Gallis, Michail A.; Torczynski, J.R.

An improved model for the gas damping of out-of-plane motion of a microbeam is developed based on the Reynolds equation (RE). A boundary condition for the RE is developed that relates the pressure at the beam perimeter to the beam motion. The two coefficients in this boundary condition are determined from Navier-Stokes (NS) simulations with the slip boundary condition for small slip lengths (relative to the gap height) and from Direct Simulation Monte Carlo (DSMC) molecular gas dynamics simulations for larger slip lengths. This boundary condition significantly improves the accuracy of the RE for cases where the beam width is only slightly greater than the gap height.