Publications Details
Reflection mass spectrometry (REMS) during III/V MBE
Reflection Mass Spectrometry (REMS) consists of a cryo-shrouded mass spectrometer which measures mass-analyzed, line-of-sight chemical fluxes from a growing wafer. It is especially useful during III/V molecular beam epitaxy (MBE) for which there are always substantial group V fluxes and often some group III fluxes leaving the wafer during growth. These fluxes depend sensitively on the instantaneous chemical reactivity of the surface. That chemical reactivity in turn depends on instantaneous alloy composition (III/III ratio), surface stoichiometry (As coverage) and temperature. In this brief summary of our work, we describe two examples of the engineering'' usefulness of REMS, involving MBE of InAlAs and InGaAs and one example of measurements of basic scientific interest. 3 figs.