Publications Details
Optimization of experimental conditions in IR reflectance determination of BPSG properties
Experiments were performed to examine sensitivity of thin-film property determinations to several experimental variables when applying multivariate calibration methods to infrared reflection spectroscopic data. Results indicate that low angles of incidence are best for robust quantitative determination of boron, phosphorus, and film thickness in borophosphosilicate glass (BPSG) dielectric films. However, the polarization state of the incidence beam does not affect the quantitative prediction ability.