Publications Details
Multiple wavelength vertical-cavity surface-emitting laser arrays using surface-controlled MOCVD growth rate enhancement and reduction
Multiple-wavelength VCSEL and photodetector arrays are useful for wavelength-multiplexed fiberoptic networks, and for optical crosstalk isolation in parallel, free-space interconnects. Multiple wavelength VCSEL arrays have been obtained by varying the growth rate using thermal gradients caused by a backside-patterned substrate, by growth enhancement on a patterned substrate, and by varying the cavity length through anodic oxidation and selective etching of the wafer. We show here for the first time both the enhancement and the reduction of the growth rate of the entire VCSEL structure on a topographically patterned substrate, and demonstrate the controlled variation of the lasing wavelengths of a VCSEL array over an extended spectral range.