Publications Details
Microsensor research
The technology that led to very large-scale integrated circuits on silicon chips also provides a basis for new microsensors that are small, inexpensive, low power, rugged, and reliable. Two examples of microsensors Sandia is developing that take advantage of this technology are the microelectronic chemical-sensor array and the radiation-sensing field-effect transistor (RADFET). Increasingly, the technology of chemical sensing needs new microsensor concepts. Applications in this area include environmental monitoring, criminal investigations, and state-of-health monitoring, both for equipment and living things. Chemical microsensors can satisfy sensing needs in the industrial, consumer, aerospace, and defense sectors. The microelectronic chemical-sensor array (Figure 1) may address some of these applications. We have fabricated six separate chemical gas-sensing areas on the microelectronic chemical-sensor array. By using different catalytic metals on the gate areas of the diodes, we can selectively sense several gases. 14 refs., 12 figs.