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MicroDiffraction in the Scanning Electron Microscope (SEM)
The identification of crystallographic phases in the scanning electron microscope (SEM) has been limited by the lack of a simple way to obtain electron diffraction data of an unknown while observing the micro structure of the specimen. With the development of Charge Coupled Device (CCD) based detectors, backscattered electron Kikuchi patterns (BEKP), alternately referred to as electron backscattered diffraction patterns (EBSP), can be easily collected. Previously, BEKP has been limited to crystallographic orientation studies due to the poor pattern quality collected with video rate detector systems. With CCD detectors, a typical BEKP can now be acquired from a micron or sub-micron-sized crystal using an exposure time of 1-10 seconds with an accelerating voltage of 10-40 kV and a beam current as low as 0.1 nA. Crystallographic phase analysis using BEKP is unique in that the properly equipped SEM permits high magnification images, BEKP`s, and elemental information to be collected from bulk specimens. BEKP in the SEM has numerous advantages over other electron microscopy crystallographic techniques. The large angular view ( 70 degrees) provided by BEKP and the lack of difficult specimen preparation are distinct advantages of the technique. No sample preparation beyond what is commonly used for SEM specimens is required for BEKP.