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Introduction to Microelectromechanical Systems (MEMS) failure analysis

Walraven, Jeremy A.

Abstract not provided.

Additional Metadata

SAND Number

SAND2010-5841C

Date Published

August 1, 2010

Research Partner

Sandia National Laboratories

Links

OSTI

Subject

Nanoscience and Nanotechnology

Keywords

Appropriate technology

Commercialization

Electromechanics

Nanostructures

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