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Hydrogen implanted 1.3 {micro}m vertical cavity surface-emitting lasers with dielectric and wafer-boned GaAs/AlAs mirrors

Hou, Hong Q.

A 1.3 {micro}m wavelength vertical-cavity surface-emitting laser (VCSEL) containing proton implanted isolation regions and a dielectric top mirror and a wafer-bonded GaAs/AlAs bottom mirror was fabricated. A room temperature pulsed threshold current density of 1.13 kA/cm{sup 2} and a threshold current of 2 mA have been demonstrated.