Publications Details
Highly uniform and reproducible visible to near-infrared vertical-cavity surface-emitting lasers grown by MOVPE
The authors present the growth and characterization of vertical-cavity surface emitting lasers (VCSELs) from visible to near-infrared wavelength grown by metalorganic vapor phase epitaxy. Discussions on the growth issue of VCSEL materials include the control on growth rate and composition using an in situ normal-incidence reflectometer, optimization of ultra-high material uniformity, and comprehensive p- and n-type doping study in AlGaAs by CCl{sub 4} and Si{sub 2}H{sub 6} over the entire Al composition range. They will also demonstrate the recent achievements of selectively-oxidized VCSELs which include the first room-temperature continuous-wave demonstration of all-AlGaAs 700-nm red VCSELs, high-performance n-side up 850-nm VCSELs, and low threshold current and low-threshold voltage 1.06 {micro}m VCSELs using InGaAs/GaAsP strain-compensated quantum wells.