Publications Details
Gemini: A hybrid plasma modelling capability for low pressure systems. User`s manual - V.1.7
Gemini is the coupling of Icarus, the Sandia National Laboratories (SNL) 2-D Direct Simulation Monte Carlo (DMSC) code, to MPRES, the University of Houston 2-D finite element plasma reactor code. Thus, Gemini is not a stand alone code. The primary application of Gemini is the simulation of inductively coupled plasma reactors that operate at low pressures (< 10mtorr) where continuum formulations of the transport equations begin to break down. Plasma parameters (electron density (ne), electron temperature (Te) and electrostatic fields (Er and Ez)) are computed in MPRES and interpolated onto the DSMC grid. This allows transport of the neutrals and ions to be performed using the DSMC method while including electron impact reactions and field transport effects. A sample calculation including appropriate input files is given.