Publications Details
Development and testing of an active platen for IC manufacturing
The conflicting demands for finer features and increased production rates in integrated circuit manufacturing have emphasized the need for improved wafer positioning technology. In this paper we present operational test results from a magnetically levitated platen with structurally integrated piezoelectric actuators. The strain based actuators provide active damping of the platen's flexible body modes, enabling increased bandwidth on the mag-lev positioning system. Test results reveal a dramatic reduction in steady state positioning error and settling time through implementation of active vibration control.