Publications Details
Computational Simulations of a Soft X-Ray Projection Lithography Laser Plasma Source
A Sandia National Laboratories/AT&T Bell Laboratories Team is developing a soft x-ray projection lithography tool that uses a compact laser plasma as a source of 14 nm x-rays. Optimization of the 14 nm x-rays source brightness is a key issue in this research. This paper describes our understanding of the source as it has been obtained through the use of computer simulations utilizing the LASNEX radiation-hydrodynamics code.