Publications Details
Chemometric analysis of IR external reflection spectra for quantitative determination of BPSG thin films
Infrared (IR) reflection spectroscopy has been shown to be useful for making rapid and nondestructive quantitative determinations of B and P contents and film thickness for borophosphosilicate glass (BPSG) thin films on silicon monitor wafers. Preliminary data also show that similarly precise determinations can be made for BPSG films on device wafers.