Nanodevices and Microsystems

Precisely controlling materials, devices and information is critical to enabling science, technology, and industry. At Sandia, we are enabling new and increasingly powerful capabilities for critical national systems through our research increasing understanding of physical phenomena across the quantum- to microscale continuum, creating novel nano- and microscale devices, achieving new methods of integration, and realizing novel microsystems-based complex systems.  

Why Our Work Matters 

Sandia’s research in these areas is helping to create radiation-hardened microsystems technologies, novel remote and in-situ sensors, advanced radio frequency (RF) devices and RF microsystems, and power electronics and energy conversion innovations for use across numerous enduring and emerging national security missions. 

Our Unique Value 

Sandia has extensive scientific and engineering expertise in areas such as material growth and process development for silicon and compounds, device and product design, advanced packaging technologies for 3-D integration, and reliability and failure analysis expertise. 

Sandia leverages the Microsystems Engineering Sciences and Applications (MESA) Complex, a 400,000-square-foot facility designed to integrate the scientific disciplines needed to produce functional, robust, and integrated microsystems. 

The MESA Fabrication Facilities provide high-mix, low-volume production of custom integrated microsystem products and support for research; technology advancement and maturation; and small-lot, fast-turn prototyping. 

Recent Highlights

FY24 Hruby and Truman Postdoctoral Distinguished Fellows

The Harry S. Truman Postdoctoral Fellowships and Jill Hruby Postdoctoral Fellowships are three-year distinguished positions at...

Four Sandia researchers win PECASE awards in 2024

The Presidential Early Career Awards for Scientists and Engineers (PECASE) is the highest honor bestowed by...

A segmented graphic design showing six elements of Sandia’s 2.5D neuromorphic discovery platform.
New 2.5D neuromorphic discovery platform will enable AI-enhanced co-design 

Novel material and device concepts previously took years for iteration. Discoveries in this LDRD project will...

New technology for heterogeneously integrated devices allows for underfilling of complex geometries using driven fluids 

Underfilling is a widely used manufacturing process that helps stabilize and reinforce solder joints in electronic...

NM - 218372 - Ulta Low Power Computing.png
Fin-ion tunable transistor for ultra-low power computing 

Data-heavy workflows such as AI require in to increase system efficiency. Work on this memory computing,...

Elongated ring polymers get tied up in knots

Many polymer liquids flow easily when stretched gently but become viscous and solid-like when stretched rapidly....

Using the power of “super-small” to solve large-scale scientific problems

Try this thought experiment: imagine a small measurable quantity of something—perhaps a grain of sand or...

Nanodevices and Microsystems Related Research Facilities

Center for Integrated Nanotechnology (CINT)

CINT is a DOE/Office of Science NSRC user facility devoted to scientific principles that govern nanoscale materials.

Modern building with decorative art feature
Micro and Nano Technologies Laboratories (MANTL)

MANTL comprises four buildings with office and lab space and Sandia’s Plating Research Laboratory. MANTL research focuses on mechanical and electrical engineering, chemistry, radiography plating, and more.

MANTL facility
Microsystems Engineering, Science and Applications (MESA)

MESA integrates scientific disciplines to produce functional, robust, integrated microsystems. Today researchers pursue advanced concepts that integrate not only electronics at the micro scale, but embody sensors, photonics, and MEMS...

Researcher proudly displaying microsystem

Related Intellectual Property

Hafnia Gate Dielectrics for Energy Conversion

Microelectronics & MEMS • Hafnia gate dielectrics for energy conversion offer a novel solution for enhanced performance in wide bandgap semiconductor device applications today and beyond​ Business Problem The electrical grid is facing increasing pressure...

Hafnia Gate Dielectrics for Energy Conversion
Grayscale Lithography by Annealed Resin Engineering (GLARE)

Microelectronics & MEMS • Novel grayscale lithography technique delivers 100x cost reduction and same-day mask production for enhanced microfabrication capabilities across industries Business Problem Grayscale Lithography by Annealed Resin Engineering (GLARE) offers industry partners...

Grayscale Lithography by Annealed Resin Engineering (GLARE)
Molecular Systems for Polymer Durability

Microelectronics & MEMS • By addressing thermal expansion mismatch, this innovative molecular system can enhance polymer durability for a wide range of applications. Business Problem Polymers are lightweight, cost-effective, easily molded, and have good...

Molecular Systems for Polymer Durability
Electro 3D: Electrochemical 3D Printing

Microelectronics & MEMS • A new method of additive manufacturing that leverages fluidics and electrochemistry to rapidly produce high-quality parts with engineering materials. Existing methods of metal 3D printing are ineffective in creating micro-resolution...

Electro 3D: Electrochemical 3D Printing
Analog Neuron Device for Brain-Computer Interface

Microelectronics & MEMS • A computing hardware approach that aspires to emulate the brain. Ruthenium-based Prussian blue analogue for artificial synapses have transformational potential in neuroprosthetics, brain disease diagnostics, and ubiquitous edge computing. In...

Electrochemical Random Access Memory (ECRAM)

Microelectronics & MEMS • An oxygen vacancy Electrochemical Random Access Memory (ECRAM) for neuromorphic computing. Artificial neural networks have become increasingly relevant and desired in today’s market; however, they are extremely energy intensive. Neuromorphic...

Highly Conductive, High Resolution Printed Electrical Traces and Components

Microelectronics & MEMS • A two-step additive manufacturing approach for forming highly conductive, high-resolution electrical traces and components with properties suited for flexible and hybrid electronics Electrical traces and conductive components are essential features...

Highly Conductive, High Resolution Printed Electrical Traces and Components
Plasma Micronozzle Adapter

Microelectronics & MEMS • A micronozzle adapter capable of printing line widths and thicknesses 10x finer than existing 3D plasma jet printers Heightened interest in next-generation printable and flexible electronics is accelerating research and...

Plasma Micronozzle Adapter
Analog Matrix Vector Multiplication

Microelectronics & MEMS • Reduces the area and energy consumption of neural network accelerators using nonvolatile memory components (NVM) Analog matrix vector multiplication (MVM) using nonvolatile memories is limited by the accuracy of the...

Analog Matrix Vector Multiplication
High Performance Dual-Mode Oscillator Circuits

Microelectronics & MEMS • Dual-mode oscillator architectures for use with SC cut resonators Sandia researchers have developed two architectures that allow dual oscillators to operate simultaneous modes from a single resonator with a high...

High Performance Dual-Mode Oscillator Circuits
Nanoscale Enabled Microinductors for Power Electronics

Microelectronics & MEMS • Scaling of magnetic passive components such as inductors and transformers has not kept pace with advances in high power semiconductor devices employing wide/ultra-wide band gap SiC, GaN, and AlN in...

Silicon Photonics

Microelectronics & MEMS • To support next generation computing, communication, and sensing needs, Sandia researchers have successfully developed a silicon photonics platform that leverages the semiconductor and nanotechnology capabilities of Sandia’s Microsystems and Engineering...

Silicon Photonics
Ultra-Wide Bandgap Power Electronics

Microelectronics & MEMS • Ultra-wide bandgap power electronics to miniaturize and vastly improve the performance and efficiency of power systems for electrical grids, vehicles, power supplies, and motors Power electronics used for routing, control,...

Ultra-Wide Bandgap Power Electronics
Miniaturized Chemical Detectors for Point-of-Care Diagnosis

Microelectronics & MEMS • Sandia’s mini-PDID makes it possible to diagnose illnesses by identifying volatile organic compounds (VOCs) associated with certain diseases and infections on a patient’s breath or in the headspace of biological...

Miniaturized Chemical Detectors for Point-of-Care Diagnosis
Monolithically Integrated Absolute Frequency Comb Laser System

Microelectronics & MEMS • Laser combs are increasingly used to provide precision measurements. Typical frequency comb systems use non-linear elements, distinct from the laser gain media, to create a set of emission lines with...

Monolithically Integrated Absolute Frequency Comb Laser System
Latching Micro Optical Switch

Microelectronics & MEMS • Sandia National Laboratories has developed a latching switch for optical fibers. One or more fibers are moved by an actuator between two positions, off and on. In the off position,...

Push Plate for Ball Grid Array Test Sockets

Microelectronics & MEMS • A low profile, controlled force, minimal torque push plate for ball grid array multi-chip module (MCM) test sockets The ball grid array (BGA) is an enabling technology for multi-chip modules,...

Microfabricated Field Calibration Assembly

Microelectronics & MEMS • Reliable determination of the presence and/or quantity of a particular analyte in the field can be greatly enhanced if the analytical instrument is equipped with a time-of-use calibration standard. While...

Low Cost TiO2 Nanoparticles

Microelectronics & MEMS • Current methods of producing titanium dioxide nanoparticles require costly surfactants and/or high temperature and pressure processing. Processing under these conditions results in nanoparticles with extremely wide particle size distributions and...

Low Cost TiO2 Nanoparticles
Vibrational Energy Converters

Microelectronics & MEMS • Summary Inexhaustible, miniature electrical power supplies offer the means to power battery-free microelectronic systems, or at a minimum provide a recharging capability to reduce battery size and extend their lifetimes....

Patent Title Patent Number Grant Date
Plasma-based method for delayering of circuits US12532680B2 01/20/2026
Plasma-based method for delayering of circuits US12532680B2 01/20/2026
Area selective deposition templated by hydrogen and halogen resists US12518967B1 01/06/2026
Area selective deposition templated by hydrogen and halogen resists US12518967B1 01/06/2026
Single clock delay step in multi-stage switched-capacitor delays US12489434B1 12/02/2025
Single clock delay step in multi-stage switched-capacitor delays US12489434B1 12/02/2025
Large programmable delay at high frequency through aliasing US12476624B1 11/18/2025
Large programmable delay at high frequency through aliasing US12476624B1 11/18/2025
Electrochemical random access memory device with contact layer as a heat source US12446479B1 10/14/2025
Electrochemical random access memory device with contact layer as a heat source US12446479B1 10/14/2025
Electrochemical random access memory device with contact layer as a heat source US12446479B1 10/14/2025
Complementary current reuse even harmonic frequency multiplier US12438506B1 10/07/2025
Integrated photonics with active polarization control US12429716B1 09/30/2025
Integrated photonics with active polarization control US12429716B1 09/30/2025
Low power mixed gas sensor US12422421B2 09/23/2025
Low power mixed gas sensor US12422421B2 09/23/2025
Ultraviolet and visible light integrated acousto-optic modulators US12416824B1 09/16/2025
Continuously variable optical confinement for optical amplifiers US12355209B1 07/08/2025
Meissner-effect transition-edge-sensor microcalorimeter US12352634B1 07/08/2025
Meissner-effect transition-edge-sensor microcalorimeter US12352634B1 07/08/2025
Continuously variable optical confinement for optical amplifiers US12355209B1 07/08/2025
Transistor with curvilinear gate configuration for improved thermal distribution US12310082B1 05/20/2025
Method for modifying or verifying a circuit by inserting a saboteur circuit US12210427B1 01/28/2025
Method for modifying or verifying a circuit by inserting a saboteur circuit US12210427B1 01/28/2025
Acoustoelectric optomechanical devices US12204183B1 01/21/2025
Acoustoelectric optomechanical devices US12204183B1 01/21/2025
Interlocking proof mass for mems inertial sensing device US12129167B1 10/29/2024
Interlocking proof mass for mems inertial sensing device US12129167B1 10/29/2024
Miniature ultra-low-power LNA employing current reuse and bias sharing US12095424B1 09/17/2024
Self-insulating metal vias in magnetic micro-devices US12094629B1 09/17/2024
Self-insulating metal vias in magnetic micro-devices US12094629B1 09/17/2024
Miniature ultra-low-power LNA employing current reuse and bias sharing US12095424B1 09/17/2024
Heterogeneous radiation-hardened computing system US12079159B1 09/03/2024
Heterogeneous radiation-hardened computing system US12079159B1 09/03/2024
Multichannel transistor with improved gate conformation US12068216B1 08/20/2024
CMOS compatible low-resistivity Al—Sc metal etch stop US12034050B1 07/09/2024
CMOS compatible low-resistivity Al—Sc metal etch stop US12034050B1 07/09/2024
Systems and methods for resolving a number of incident RF-range photons US12029141B1 07/02/2024
Systems and methods for resolving a number of incident RF-range photons US12029141B1 07/02/2024
Systems and methods for resolving a number of incident RF-range photons US12029141B1 07/02/2024
Heterogeneously integrated acoustoelectric amplifiers US11948979B1 04/02/2024
Heterogeneously integrated acoustoelectric amplifiers US11948979B1 04/02/2024
Thermally sensitive state change ionic redox transistor US11942282B1 03/26/2024
Monolithic integration of optical waveguides with metal routing layers US11906351B1 02/20/2024
Monolithic integration of optical waveguides with metal routing layers US11906351B1 02/20/2024
Systems, methods and computer program products for charging autonomous wireless sensors in subsurface environments US11876398B1 01/16/2024
High aspect ratio gratings fabricated by electrodeposition US11798844B1 10/24/2023
Method of chemical doping that uses CMOS-compatible processes US11798808B1 10/24/2023
Concentrated thermal tuner for optical microdisk devices US11796841B1 10/24/2023
High aspect ratio gratings fabricated by electrodeposition US11798844B1 10/24/2023
Method of chemical doping that uses CMOS-compatible processes US11798808B1 10/24/2023
Multi-chip photonics transceiver US11726276B1 08/15/2023
Multi-chip photonics transceiver US11726276B1 08/15/2023
MEMS-tunable optical ring resonator US11722120B1 08/08/2023
MEMS-tunable optical ring resonator US11722120B1 08/08/2023
Heterogeneous integration of an electro-optical platform US11675126B1 06/13/2023
Heterogeneous integration of an electro-optical platform US11675126B1 06/13/2023
Integrated silicon optical amplifier with reduced residual pump US11652330B1 05/16/2023
Integrated silicon optical amplifier with reduced residual pump US11652330B1 05/16/2023
Low power sensor for NOx detection US11573217B2 02/07/2023
Low power sensor for NOx detection US11573217B2 02/07/2023
Piezoelectric deformable photonic devices US11569431B1 01/31/2023
Piezoelectric deformable photonic devices US11569431B1 01/31/2023
Miniaturized vacuum package and methods of making same US11551921B1 01/10/2023
Enhanced microfabrication using electrochemical techniques US11549903B1 01/10/2023
Miniaturized vacuum package and methods of making same US11551921B1 01/10/2023
Enhanced microfabrication using electrochemical techniques US11549903B1 01/10/2023
Compact laser source with frequency modulators generating multiple lines US11545815B1 01/03/2023
Compact laser source with frequency modulators generating multiple lines US11545815B1 01/03/2023
Analog vector-matrix multiplication by capacitive elements with resistive state storage US11494464B1 11/08/2022
Analog vector-matrix multiplication by capacitive elements with resistive state storage US11494464B1 11/08/2022
Metal stack templates for suppressing secondary grains in sca1n US11482660B1 10/25/2022
Metal stack templates for suppressing secondary grains in sca1n US11482660B1 10/25/2022
Thermally sensitive ionic redox transistor US11450802B1 09/20/2022
Thermally sensitive ionic redox transistor US11450802B1 09/20/2022
Photolithography of atomic layer resist US11424135B1 08/23/2022
Photolithography of atomic layer resist US11424135B1 08/23/2022
Phase-wrapping method for beam steering in optical phased arrays US11409183B1 08/09/2022
Phase-wrapping method for beam steering in optical phased arrays US11409183B1 08/09/2022
Hybrid piezoelectric microresonator US11387802B1 07/12/2022
Tunneling full-wave infrared rectenna US11296240B1 04/05/2022
Tunneling full-wave infrared rectenna US11296240B1 04/05/2022
Active shunt capacitance cancelling oscillator for resonators US11171604B1 11/09/2021
Active shunt capacitance cancelling oscillator for resonators US11171604B1 11/09/2021
Optical coupler for heterogeneous integration US11163115B1 11/02/2021
Optical coupler for heterogeneous integration US11163115B1 11/02/2021
Trapped ion platform with optical input and output US11150609B1 10/19/2021
Trapped ion platform with optical input and output US11150609B1 10/19/2021
Apparatus and method to measure semiconductor optical absorption using microwave charge sensing US11125700B2 09/21/2021
Apparatus and method to measure semiconductor optical absorption using microwave charge sensing US11125700B2 09/21/2021
Microfabricated ion trap chip with in situ radio-frequency sensing US11056332B1 07/06/2021
Microfabricated ion trap chip with in situ radio-frequency sensing US11056332B1 07/06/2021
Optical devices enabled by vertical dielectric Mie resonators US11017186B2 05/25/2021
Microfabricated ion trap chip with an integrated microwave antenna US10984976B1 04/20/2021
Dual frequency transceiver device US10984300B2 04/20/2021
Dual frequency transceiver device US10984300B2 04/20/2021
Microfabricated ion trap chip with an integrated microwave antenna US10984976B1 04/20/2021
Focusing transformers/filters in isotropic/anisotropic piezoelectrics US10979018B1 04/13/2021
Method of fabricating photosensitive devices with reduced process-temperature budget US10910508B1 02/02/2021
Method of fabricating photosensitive devices with reduced process-temperature budget US10910508B1 02/02/2021
Heterogeneously integrated electro-optic modulator US10788689B1 09/29/2020
Heterogeneously integrated electro-optic modulator US10788689B1 09/29/2020
Heterogeneously integrated electro-optic modulator US10788689B1 09/29/2020
Hybrid semiconductor-piezoacoustic radiofrequency device US10666222B1 05/26/2020
ScAIN etch mask for highly selective etching US10651048B1 05/12/2020
ScAIN etch mask for highly selective etching US10651048B1 05/12/2020
Active mechanical-environmental-thermal MEMS device for nanoscale characterization US10641733B2 05/05/2020
Active mechanical-environmental-thermal MEMS device for nanoscale characterization US10641733B2 05/05/2020
Fabrication of multilayered carbon MEMS devices US10570010B1 02/25/2020
Fabrication of multilayered carbon MEMS devices US10570010B1 02/25/2020
Supply-noise-rejecting current source US10566936B1 02/18/2020
Supply-noise-rejecting current source US10566936B1 02/18/2020
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby US10553697B1 02/04/2020
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby US10553697B1 02/04/2020
Thallium bromide (TIBr) semiconductors and devices with extended life apparatus, methods, and system US10516068B1 12/24/2019
Thallium bromide (TIBr) semiconductors and devices with extended life apparatus, methods, and system US10516068B1 12/24/2019
Evanescently coupled piezoelectric acoustic devices US10491190B1 11/26/2019
Non-inverting multi-mode oscillator US10483912B1 11/19/2019
Low-power MEMS wakeup system US10481672B1 11/19/2019
Low-power MEMS wakeup system US10481672B1 11/19/2019
Non-inverting multi-mode oscillator US10483912B1 11/19/2019
Systems and methods for interferometric end point detection for a focused ion beam fabrication tool US10446369B1 10/15/2019
Systems and methods for interferometric end point detection for a focused ion beam fabrication tool US10446369B1 10/15/2019
Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors US10392243B2 08/27/2019
Coupled memristor devices to enable feedback control and sensing of micro/nanoelectromechanical actuator and sensors US10392243B2 08/27/2019
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby US10388753B1 08/20/2019
Regrowth method for fabricating wide-bandgap transistors, and devices made thereby US10388753B1 08/20/2019
Bus based timed input output module US10289573B1 05/14/2019
Bus based timed input output module US10289573B1 05/14/2019
Variable bandwidth filter US10267896B1 04/23/2019
Variable bandwidth filter US10267896B1 04/23/2019
Communication device and method of making the same US10235614B1 03/19/2019
Communication device and method of making the same US10235614B1 03/19/2019
Via configuration for wafer-to-wafer interconnection US10224312B1 03/05/2019
Via configuration for wafer-to-wafer interconnection US10224312B1 03/05/2019
Method for simultaneous modification of multiple semiconductor device features US10217704B1 02/26/2019
Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture US10214415B1 02/26/2019
Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture US10214415B1 02/26/2019
Hybrid CMOS-MEMS devices adapted for high-temperature operation and method for their manufacture US10214415B1 02/26/2019
Gm-C filter and multi-phase clock circuit US10181840B1 01/15/2019
Gm-C filter and multi-phase clock circuit US10181840B1 01/15/2019
Passive radiative cooling of a body US10173792B1 01/08/2019
Passive radiative cooling of a body US10173792B1 01/08/2019
Trimming method for microresonators and microresonators made thereby US10148244B1 12/04/2018
Trimming method for microresonators and microresonators made thereby US10148244B1 12/04/2018
Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals US10141495B1 11/27/2018
Vertically integrated optoelectronics package for MEMS devices US10139564B1 11/27/2018
Vertically integrated optoelectronics package for MEMS devices US10139564B1 11/27/2018
Microsystems-based method and apparatus for passive detection and processing of radio-frequency signals US10141495B1 11/27/2018
Graphene heat dissipating structure US10096536B1 10/09/2018
Graphene heat dissipating structure US10096536B1 10/09/2018
Supply-noise-rejecting current source US10090826B1 10/02/2018
System on chip module configured for event-driven architecture US10089160B2 10/02/2018
System on chip module configured for event-driven architecture US10089160B2 10/02/2018
Supply-noise-rejecting current source US10090826B1 10/02/2018
Systems and methods to maintain optimum stoichiometry for reactively sputtered films US10074522B1 09/11/2018
Method and apparatus of enhanced thermoelectric cooling and power conversion US10072879B1 09/11/2018
Method and apparatus of enhanced thermoelectric cooling and power conversion US10072879B1 09/11/2018
Optomechanical force sensors, cantilevers, and systems thereof US10031158B1 07/24/2018
Optomechanical force sensors, cantilevers, and systems thereof US10031158B1 07/24/2018
Methods for suppressing spurious modes in microresonators US10009002B1 06/26/2018
Flexible packaging for microelectronic devices US9978895B2 05/22/2018
Flexible packaging for microelectronic devices US9978895B2 05/22/2018
Packaging system with cleaning channel and method of making the same US9972553B1 05/15/2018
Packaging system with cleaning channel and method of making the same US9972553B1 05/15/2018
Attenuation of spurious responses in electromechanical filters US9941857B1 04/10/2018
Attenuation of spurious responses in electromechanical filters US9941857B1 04/10/2018
Superlattice photodetector having improved carrier mobility US9929293B1 03/27/2018
Superlattice photodetector having improved carrier mobility US9929293B1 03/27/2018
Diode and method of making the same US9917149B1 03/13/2018
Gallium beam lithography for superconductive structure formation US9882113B1 01/30/2018
Gallium beam lithography for superconductive structure formation US9882113B1 01/30/2018
Second harmonic generation in resonant optical structures US9865987B1 01/09/2018
Second harmonic generation in resonant optical structures US9865987B1 01/09/2018
Ion-barrier for memristors/ReRAM and methods thereof US9831427B1 11/28/2017
Method of making thermally-isolated silicon-based integrated circuits US9824932B1 11/21/2017
Electroabsorption optical modulator US9823497B1 11/21/2017
Electroabsorption optical modulator US9823497B1 11/21/2017
Method of making thermally-isolated silicon-based integrated circuits US9824932B1 11/21/2017
System on chip module configured for event-driven architecture US9792250B1 10/17/2017
Processing device with self-scrubbing logic US9792184B2 10/17/2017
System on chip module configured for event-driven architecture US9792250B1 10/17/2017
Processing device with self-scrubbing logic US9792184B2 10/17/2017
Apparatus for assembly of microelectronic devices US9763370B2 09/12/2017
Apparatus for assembly of microelectronic devices US9763370B2 09/12/2017
Graphene heat dissipating structure US9721867B1 08/01/2017
Graphene heat dissipating structure US9721867B1 08/01/2017
Fast frequency divider circuit using combinational logic US9667231B1 05/30/2017
Method of making a silicon nanowire device US9660026B1 05/23/2017
Wafer scale oblique angle plasma etching US9659797B1 05/23/2017
Method of making a silicon nanowire device US9660026B1 05/23/2017
Wafer scale oblique angle plasma etching US9659797B1 05/23/2017
Thermally-isolated silicon-based integrated circuits and related methods US9646874B1 05/09/2017
Thermally-isolated silicon-based integrated circuits and related methods US9646874B1 05/09/2017
Single crystal micromechanical resonator US9641154B2 05/02/2017
Single crystal micromechanical resonator US9641154B2 05/02/2017
Plasmon-assisted optical vias for photonic ASICS US9599781B1 03/21/2017
Visible light laser voltage probing on thinned substrates US9599667B1 03/21/2017
Plasmon-assisted optical vias for photonic ASICS US9599781B1 03/21/2017
Visible light laser voltage probing on thinned substrates US9599667B1 03/21/2017
Photoelectrochemically driven self-assembly method US9548411B2 01/17/2017
Methods of depositing an alpha-silicon-carbide-containing film at low temperature US9546420B1 01/17/2017
Photoelectrochemically driven self-assembly method US9548411B2 01/17/2017
Methods of depositing an alpha-silicon-carbide-containing film at low temperature US9546420B1 01/17/2017
Silicon nanowire device and method for its manufacture US9536947B1 01/03/2017
Silicon nanowire device and method for its manufacture US9536947B1 01/03/2017
Single crystal micromechanical resonator and fabrication methods thereof US9525398B1 12/20/2016
Single crystal micromechanical resonator and fabrication methods thereof US9525398B1 12/20/2016
Transparent contacts for stacked compound photovoltaic cells US9508881B2 11/29/2016
Transparent contacts for stacked compound photovoltaic cells US9508881B2 11/29/2016
Methods for dry etching semiconductor devices US9484216B1 11/01/2016
Methods for dry etching semiconductor devices US9484216B1 11/01/2016
Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof US9477040B1 10/25/2016
Guided-wave photodiode using through-absorber quantum-well-intermixing and methods thereof US9477040B1 10/25/2016
Zero-power receiver US9460321B1 10/04/2016
Silicon force sensor and method of using the same US9459161B1 10/04/2016
Zero-power receiver US9460321B1 10/04/2016
Silicon force sensor and method of using the same US9459161B1 10/04/2016
Fabrication method for small-scale structures with non-planar features US9448336B1 09/20/2016
Fabrication method for small-scale structures with non-planar features US9448336B1 09/20/2016
Integrated field emission array for ion desorption US9425019B1 08/23/2016
Multilevel resistive information storage and retrieval US9412446B1 08/09/2016
Silicon force sensor US9383270B1 07/05/2016
Silicon force sensor US9383270B1 07/05/2016
Microresonator electrode design US9337800B1 05/10/2016
Methods for resistive switching of memristors US9336870B1 05/10/2016
Integrated circuit test-port architecture and method and apparatus of test-port generation US9311444B1 04/12/2016
Integrated circuit test-port architecture and method and apparatus of test-port generation US9311444B1 04/12/2016
Programmable electroacoustic filter apparatus and method for its manufacture US9276557B1 03/01/2016
Processing device with self-scrubbing logic US9274895B1 03/01/2016
Programmable electroacoustic filter apparatus and method for its manufacture US9276557B1 03/01/2016
Processing device with self-scrubbing logic US9274895B1 03/01/2016
Apparatuses and methods for tuning center frequencies US9270281B1 02/23/2016
Apparatuses and methods for tuning center frequencies US9270281B1 02/23/2016
Tuning method for microresonators and microresonators made thereby US9203134B1 12/01/2015
Fully integrated and encapsulated micro-fabricated vacuum diode and method of manufacturing same US9202657B1 12/01/2015
Tuning method for microresonators and microresonators made thereby US9203134B1 12/01/2015
Fabrication of small-scale structures with non-planar features US9190736B1 11/17/2015
Three-dimensional stacked structured ASIC devices and methods of fabrication thereof US9190392B1 11/17/2015
Fabrication of small-scale structures with non-planar features US9190736B1 11/17/2015
Three-dimensional stacked structured ASIC devices and methods of fabrication thereof US9190392B1 11/17/2015
Separating semiconductor devices from substrate by etching graded composition release layer disposed between semiconductor devices and substrate including forming protuberances that reduce stiction US9029239B2 05/12/2015
Separating semiconductor devices from substrate by etching graded composition release layer disposed between semiconductor devices and substrate including forming protuberances that reduce stiction US9029239B2 05/12/2015
Protecting integrated circuits from excessive charge accumulation during plasma cleaning of multichip modules US9013046B1 04/21/2015
Protecting integrated circuits from excessive charge accumulation during plasma cleaning of multichip modules US9013046B1 04/21/2015
Membrane projection lithography US8981337B1 03/17/2015
Membrane projection lithography US8981337B1 03/17/2015
Processes for multi-layer devices utilizing layer transfer US8946052B2 02/03/2015
Processes for multi-layer devices utilizing layer transfer US8946052B2 02/03/2015
Method of forming through substrate vias (TSVs) and singulating and releasing die having the TSVs from a mechanical support substrate US8906803B2 12/09/2014
Method of forming through substrate vias (TSVs) and singulating and releasing die having the TSVs from a mechanical support substrate US8906803B2 12/09/2014
Frequency selective infrared sensors US8897609B1 11/25/2014
Structured wafer for device processing US8895364B1 11/25/2014
Structured wafer for device processing US8895364B1 11/25/2014
Frequency selective infrared sensors US8897609B1 11/25/2014
Memristor using a transition metal nitride insulator US8872246B1 10/28/2014
Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode US8814622B1 08/26/2014
Micromachined force-balance feedback accelerometer with optical displacement detection US8783106B1 07/22/2014
Plasmon absorption modulator systems and methods US8780431B1 07/15/2014
Plasmon absorption modulator systems and methods US8780431B1 07/15/2014
Infrared nanoantenna apparatus and method for the manufacture thereof US8750653B1 06/10/2014
Full tape thickness feature conductors for EMI structures US8747591B1 06/10/2014
Full tape thickness feature conductors for EMI structures US8747591B1 06/10/2014
Infrared nanoantenna apparatus and method for the manufacture thereof US8750653B1 06/10/2014
Parallel optical sampler US8730562B1 05/20/2014
Structured wafer for device processing US8729673B1 05/20/2014
Optically transduced MEMS gyro device US8726730B1 05/20/2014
Structured wafer for device processing US8729673B1 05/20/2014
Optically transduced MEMS gyro device US8726730B1 05/20/2014
Optical domain analog to digital conversion methods and apparatus US8725004B1 05/13/2014
Microscale autonomous sensor and communications module US8680810B1 03/25/2014
Microscale autonomous sensor and communications module US8680810B1 03/25/2014
Ovenized microelectromechanical system (MEMS) resonator US8669823B1 03/11/2014
Die singulation method US8623744B1 01/07/2014
Die singulation method US8623744B1 01/07/2014
Micro electro mechanical system optical switching US8611706B1 12/17/2013
Microfabricated ion frequency standard US7859350B1 12/28/2010
Microfabricated ion frequency standard US7859350B1 12/28/2010
Microfabricated bulk wave acoustic bandgap device US7836566B1 11/23/2010
Microfabricated bulk wave acoustic bandgap device US7836566B1 11/23/2010
Dual-range linearized transimpedance amplifier system US7825735B1 11/02/2010
Dual-range linearized transimpedance amplifier system US7825735B1 11/02/2010
Fabrication of thermal microphotonic sensors and sensor arrays US7820970B1 10/26/2010
Optical data latch US7787719B1 08/31/2010
Microfabricated bulk wave acoustic bandgap device US7733198B1 06/08/2010
Microfabricated bulk wave acoustic bandgap device US7733198B1 06/08/2010
Method for forming precision clockplate with pivot pins US7728248B1 06/01/2010
Method for forming precision clockplate with pivot pins US7728248B1 06/01/2010
Nanoeletromechanical switch and logic circuits formed therefrom US7719318B1 05/18/2010
Microelectromechanical tunable inductor US7710232B1 05/04/2010
Eddy-current-damped microelectromechanical switch US7633362B1 12/15/2009
Microelectromechanical resonator and method for fabrication US7616077B1 11/10/2009
Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films US7597819B1 10/06/2009
Redox buffered hydrofluoric acid etchant for the reduction of galvanic attack during release etching of MEMS devices having noble material films US7597819B1 10/06/2009
Microelectromechanical flow control apparatus US7540469B1 06/02/2009
Microelectromechanical flow control apparatus US7540469B1 06/02/2009
Inertial sensing microelectromechanical (MEM) safe-arm device US7530312B1 05/12/2009
Inertial sensing microelectromechanical (MEM) safe-arm device US7530312B1 05/12/2009
Method and apparatus for creating a topography at a surface US7449699B1 11/11/2008
Methods for the precise locating and forming of arrays of curved features into a workpiece US7434299B1 10/14/2008
Methods for the precise locating and forming of arrays of curved features into a workpiece US7434299B1 10/14/2008
Micro electro-mechanical system (MEMS) pressure sensor for footwear US7426873B1 09/23/2008
Micro electro-mechanical system (MEMS) pressure sensor for footwear US7426873B1 09/23/2008
Apparatus for raising or tilting a micromechanical structure US7421924B1 09/09/2008
Apparatus for raising or tilting a micromechanical structure US7421924B1 09/09/2008
Differential transimpedance amplifier circuit for correlated differential amplification US7403065B1 07/22/2008
Differential transimpedance amplifier circuit for correlated differential amplification US7403065B1 07/22/2008
Pyroelectric demodulating detector US7397301B1 07/08/2008
Pyroelectric demodulating detector US7397301B1 07/08/2008
Contour mode resonators with acoustic reflectors US7385334B1 06/10/2008
Geophysics-based method of locating a stationary earth object US7376507B1 05/20/2008
Laser-based irradiation apparatus and method to measure the functional dose-rate response of semiconductor devices US7375332B1 05/20/2008
Laser-based irradiation apparatus and method to measure the functional dose-rate response of semiconductor devices US7375332B1 05/20/2008
Optical displacement sensor US7355720B1 04/08/2008
Optical displacement sensor US7355720B1 04/08/2008
Tensile-stressed microelectromechanical apparatus and microelectromechanical relay formed therefrom US7339454B1 03/04/2008
Integration of a waveguide self-electrooptic effect device and a vertically coupled interconnect waveguide US7336855B1 02/26/2008
Radiation-hardened transistor and integrated circuit US7298010B1 11/20/2007

Current Nanodevices and Microsystems Openings

Current Nanodevices and Microsystems Openings

  • No jobs currently listed for this location.
View All Sandia Openings