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Reflection mass spectrometry (REMS) during III/V MBE

Tsao, Jeffrey Y.

Reflection Mass Spectrometry (REMS) consists of a cryo-shrouded mass spectrometer which measures mass-analyzed, line-of-sight chemical fluxes from a growing wafer. It is especially useful during III/V molecular beam epitaxy (MBE) for which there are always substantial group V fluxes and often some group III fluxes leaving the wafer during growth. These fluxes depend sensitively on the instantaneous chemical reactivity of the surface. That chemical reactivity in turn depends on instantaneous alloy composition (III/III ratio), surface stoichiometry (As coverage) and temperature. In this brief summary of our work, we describe two examples of the engineering'' usefulness of REMS, involving MBE of InAlAs and InGaAs and one example of measurements of basic scientific interest. 3 figs.

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Time-resolved measurements of solidification and undercooling in metals and alloys

Tsao, Jeffrey Y.

We have performed nanosecond-resolution measurements of the lateral electrical resistivity of thin metal films on insulating substrates. Comparison of transient resistivity measurements with optical reflectivity measurements and heat-flow calculations permits the determination of the position and velocity of a planar crystal/melt in interface, and an estimate of undercooling during pulsed laser melting of metals. We report detailed results for rapid solidification of Ni, including the observation of hypercooling of liquid Ni. 14 refs., 3 figs., 1 tab.

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Results 126–127 of 127
Results 126–127 of 127
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