Publications

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A mesoscale dimensional artifact based on silicon bulk micromachining fabrication has been developed with the intention of evaluating the artifact both on a high precision Coordinate Measuring Machine (CMM), and on a video-probe based measuring system. A high accuracy touch-probe based CMM can achieve accuracies that are as good as the 2-D repeatability of video-probe systems. While video-probe based systems are commonly used to inspect mesoscale mechanical components, a video-probe system's certified accuracy is generally much worse than its repeatability. By using a hybrid artifact where the same features can be extracted by both a touch-probe and a video-probe, the accuracy of video-probe systems can be improved. In order to use the micromachined device as a calibration artifact, it is important to understand the uncertainty present in the touch-probe measurements. An uncertainty analysis is presented to show the potential accuracy of the measurement of these artifacts on a high precision CMM.

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We are developing calibration artifacts for mesoscale metrology (especially vision probing) by using silicon bulk micromachining. We evaluate these artifacts on both high accuracy coordinate measuring machines (CMMs) and on typical production vision-based measurement systems. This will improve the accuracy of vision-based measurement equipment used in production. Successful realization of these mesoscale artifacts will enhance both production metrology capabilities and reduce manufacturing costs. Copyright © 2006 by ASME.

CMMs equipped with non-contact probes, such as video probes, are becoming popular for a variety of 2-D or 2.5-D objects. The advantages of a video (or vision) probe include the ability to measure features which are either too small or too delicate for a touch probe. Unfortunately, vision-based probing systems do not have the same measurement accuracy as touch probe equipped machines. For example, a Moore M48 coordinate measurement machine has an expected measurement uncertainty of 0.2 μm (plus a scale dependent term) when using a touch probe (the actual repeatability is on the order of 0.03 μm). When the probe is changed to a Leitz LS1 vision system, the expected measurement uncertainty is 1.2 μm plus a scale dependent term. The decreased accuracy is due entirely to the change in probing method. Components of the error budget include environmental effects, choice of lighting, lens distortions, and stage 2-D accuracy. Lighting is a major contributor to the measurement error budget, especially when a bidirectional measurement needs to be made (for example, the width of a line, rather than the center location of a line). We report on the effect of the sensitivity of vision probing on an OGP Avant Apex 200 to different lighting conditions, both for unidirectional and bidirectional measurements.

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