MPL Non Cubic Fabrication
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Applied Physics Letters
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2013 Conference on Lasers and Electro-Optics, CLEO 2013
Tellurium dielectric resonator metamaterials were fabricated using a newly developed multi-cycle deposition-etch process. Deposition and etching of Tellurium were studied in detail. All the samples showed two transmission minima corresponding to magnetic and electric dipole resonances. © 2013 The Optical Society.
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Carbon
In recent years pyrolysis of interferometrically-patterned photoresists has produced three-dimensionally nanopatterned, electrically conductive carbon films with applications from energy storage to biological sensing. We investigate here conditions for rapid thermal pyrolysis that drastically reduce film processing time (from hours to minutes) while preserving the films' unique nanoscale morphology, film adhesion, and electrochemical properties. We specifically show that heating rate dramatically affects nanoscale morphology, while reducing atmosphere composition, dwell time, and dwell temperature impact the electrochemical performance of these rapidly pyrolyzed nanostructures. Accelerated processing with rapid thermal pyrolysis may facilitate the expanded applicability and rapid fabrication of these promising nanostructured materials. © 2012 Elsevier Ltd. All rights reserved.
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