New microsystem packaging capabilities at Sandia National Laboratories
Abstract not provided.
Abstract not provided.
The steady state and transient thermal behavior of an electromigration test structure was analyzed. The test structure was a Sandia SHIELD (Self-stressing HIgh fregquency rELiability Device) electromigration test device manufactured by an outside vendor. This device has a high frequency oscillator circuit, a buffer circuit to isolate and drive the metal line to the tested (DUT), the DUT to be electromigrated itself, a metal resistance thermometry monitor, and a heater elment to temperature accelerate the electromigration effect.