Publications

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During the fiscal years 92-94 a joint group from Sandia/New Mexico and Sandia/California studied the development of new laser-plasma targets for projection x-ray or EUV (extreme ultraviolet) lithography. Our experimental and theoretical analyses incorporated target design as an integral part of the lithographic optical system. Targets studied included thick solid targets, thin-foil metal-coated targets, and cryogenic targets. Our complete measurement suite consisted of x-ray conversion efficiency measurements, source size imaging, source x-ray angular distribution measurements, debris collection, and source EUV spectrum. Target evaluation also included the variation of laser characteristics, such as, laser intensity, spot size, wavelength, pulselength, and pulseshape. Over the course of these experiments we examined targets using KrF (248nm), XeCl (308nm), and CO{sub 2} (10.6 {mu}m) lasers. While debris issues now dominate research in this area, final details were concluded on our understanding of material spectra and radiation transport of 13 run light in laser-plasmas. Additionally, conclusive results were obtained with 308 rim light, showing the pulselength threshold below which plumes no longer limited the transmission of (and thus the conversion efficiency to) 13 nm radiation.

Extensive simulations of Tokamak disruptions have provided a picture of material erosion that is limited by the transfer of energy from the incident plasma to the armor solid surface through a dense vapor shield. Radiation spectra were recorded in the VUV and in the visible at the Efremov Laboratories on VIKA using graphite targets. The VUV data were recorded with a Sandia Labs transmission grating spectrograph, covering 1--40 nm. Plasma parameters were evaluated with incident plasma energy densities varying from 1--10 kJ/cm{sup 2}. A second transmission grating spectrograph was taken to 2MK-200 at TRINITI to study the plasma-material interface in magnetic cusp plasma. Target materials included POCO graphite, ATJ graphite, boron nitride, and plasma-sprayed tungsten. Detailed spectra were recorded with a spatial resolution of {approximately}1 mm resolution. Time-resolved data with 40--200 ns resolution was also recorded. The data from both plasma gun facilities demonstrated that the hottest plasma region was sitting several millimeters above the armor tile surface.