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SH-SAW Sensor Platform for Chemical Detection in Aqueous Solutions

Cernosek, R.W.

Chemically sensitive polymers coated on delay lines utilizing shear horizontal surface acoustic wave (SH-SAW) sensors are investigated for the detection of organic analytes in liquid environments. The SH-SAW sensor platform was designed and fabricated on 36{degree} rotated Y-cut LiTaO{sub 3}. By depositing a SiO{sub 2} dielectric layer over the entire device prior to applying the polymer film, partial electrical passivation of the interdigital transducers (IDT) is obtained while increasing the mass sensitivity of the device. Changes in the mechanical properties of the chemically sensitive polymer materials were clearly detectable through a frequency shift at least one order of magnitude larger than that of a coated-quartz crystal resonator (QCR) in a similar experiment.