Publications Details

RGA Analysis of Plasma Cleaned Vacuum Systems [Slides]

Robinson Brown, Dennis R.; Brumbach, Michael T.; Mirabal, Alex J.

The goal of this project was to qualitatively evaluate the efficacy of using plasma cleaning to remove PDMS from vacuum systems. Silicon containing compounds are notorious for interfering with vacuum system techniques such as x-ray photoelectron spectroscopy (XPS), Auger Electron Spectroscopy (AES) and Secondary lon Mass Spectrometry (SIMS). Finding a way to remotely and rapidly remove contaminants from a system saves time and money for analysts using vacuum analytical techniques.