Publications Details

RF magnetron sputter-deposition of La0.5Sr0.5CoO3//Pt composite electrodes for Pb(Zr,Ti)O3 thin film capacitors

Raymond, M.V.

La0.5Sr0.5CoO3 (LSCO) thin films have been deposited, using RF magnetron sputter-deposition for use as an electrode material for Pb(Zr,Ti)O3 (PZT) thin film capacitors. The effect of the O2:Ar sputter gas ratio during deposition, on the LSCO film properties was investigated. It was found that the resistivity of the LSCO films deposited at ambient temperature decreases as the O2:Ar ratio was increased for both the as-deposited and annealed films. In addition, it was found that thin overlayers of LSCO tend to stabilize the underlying Pt//Ti electrode structure during subsequent thermal processing. The LSCO//Pt//Ti composite electrode stack has a low resistivity and provides excellent fatigue performance for PZT capacitors. Furthermore, the LSCO//Pt//Ti electrode sheet resistance does not degrade with annealing temperature and the electrode does not display hillock formation. Possible mechanisms for the stabilization of the Pt//Ti electrode with LSCO overlayers will be discussed.