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Raman features of CVD diamond films
There is considerable interest in the use of chemically vapor deposited (CVD) polycrystalline diamond films in advanced materials technology. However, most of the potential applications of CVD diamond films require well-controlled properties which depend on the film structure, and in turn, on the conditions under which the films are synthesized. The structure of the vapor-deposited diamond films is frequently characterized by Raman spectroscopy. Despite extensive research, much work still needs to be completed to understand the various features of the Raman spectra and to understand how the processing variables affect the spectral features. This paper examines the Raman spectra of diamond films prepared by a hot-filament-assisted CVD process as a function of substrate processing and deposition parameters.