Publications Details

Quantitative X-Ray spectrum imaging of lead lanthanum zirconate titanate PLZT thin-films

Parish, Chad M.; Brennecka, Geoffrey L.; Tuttle, Bruce T.; Brewer, Luke N.

The high permittivity of Pb(Zr,Ti)O3 and (Pb,La)(Zr,Ti)O 3 - PZT and PLZT, respectively - thin films and the flexibility of chemical solution deposition (CSD) make solution-derived P(L)ZT thin films extremely attractive for integrated capacitor applications. However, Pb-loss or cation segregation during processing results in degraded properties of the final film. Here, we have extended the use of multivariate statistical analysis (MSA) of energy-dispersive spectroscopy (EDS) spectrum images (SIs) in scanning transmission electron microscopy (STEM) to allow the two-dimensional (2D) quantitative analysis of cation segregation and depletion in P(L)ZT thin films. Quantified STEM-EDS SIs allow high-resolution (< ≈10 nm) quantification of these cation distributions. Surface Pb depletion is found after crystallization and is replenished by a unique post-crystallization PbO overcoat+anneal processes. Zr/Ti and La segregation are found to develop in a decidedly nonplanar fashion during crystallization, especially in PLZT 12/70/30 material, highlighting the need for 2D analysis. Quantitative 2D chemical information is essential for improved processing of homogeneous P(L)ZT films with optimal electrical properties. © 2008 Sandia Corporation. Journal compilation © 2008 The American Ceramic Society.