Publications Details
Processing experiments for development of high-efficiency silicon solar cells
Fabrication of high-efficiency silicon solar cells requires processing technology capable of maintaining long bulk carrier lifetime and low surface recombination. Development of long-lifetime processing techniques using experimental designs based on statistical methods is described. The first three experiments investigated pre-oxidation cleans, phosphorus gettering, and a comparison of different phosphorus diffusion sources. Optimal processing parameters were found to depend on type of silicon material. 2 refs., 2 figs., 2 tabs.