Publications Details

Origin of the Time-Dependence of Wet Oxidation of AlGaAs

Allerman, A.A.; Ashby, C.I.H.; Bridges, M.M.; Hammons, B.E.; Hou, H.Q.

The time-dependence of the wet oxidation of high-Al-content AlGaAs can be either linear, indicating reaction-rate limitation, or parabolic, indicating diffusion-limited rates. The transition from linear to parabolic time dependence can be explained by the increased rate of the formation of intermediate As{sub 2}O{sub 3} vs. its reduction to elemental As. A steadily increasing thickness of the As{sub 2}O{sub 3}-containing region at the oxidation front will shift the process from the linear to the parabolic regime. This shift from reaction-rate-limited (linear) to diffusion-limited (parabolic) time dependence is favored by increasing temperature or increasing Al mole fraction.