Publications Details

Optical sensing of microsystem motion and performance

Holswade, Scott C.; Dickey, Fred M.

Microsystems involve several fabrication technologies, but share the common trait of dimensions and motions measured in microns. Small feature sizes and deflections make the detection of microdevice motion particularly difficult. The rapid operating frequencies of many microactuators compound the detection problem. Effective feedback, control, and performance measurement of microactuators thus become problematic. These measurements are particularly important, however, due to the developmental nature of many microsystem technologies. Wear, lifetime issues, and optimized drive signals, for example, are poorly understood for many actuation devices. As microactuators move out of the development stage and begin to perform work on external assemblies and environments, the various load conditions will also come into account. Since microactuators involve small masses and inertias, effective driving of external loads may require feedback-based control of the microdevice. Optical sensing technologies offer solutions to these problems of sensor motion, microactuator analysis during the development process, and integrated feedback for microactuators driving external loads. Optical methods also end themselves to the effectively 1D nature of many microsystem motions, limiting the required signal analysis to practical levels that support real-time measurement and control. This paper describes several optical techniques for sensing motion, performance, and feedback data, some of which can integrated with the microsystems themselves. For microactuators, experimental results indicate that real-time performance measurements are particularly revealing for understanding device motion and response. For microsensors, experimental result are also presented for interpreting motion using external and integrated optical techniques.