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Novel Source Development for Focused Ion Beam Implantation and Irradiation [Slides]

Bielejec, E.; Titze, M.; Katzenmeyer, A.; Belianinov, A.; Wang, Y.; Doyle, B.L.

We have demonstrated focused ion implantation for fabrication of single atom devices and nanofabrication. This is a viable solution for prototyping - fast and easy! There is on-going work in diamond, SiN, SiC, hBN, GaN, AlGan, etc. A new liquid metal alloy ion source development is on-going. There is a pathway towards deterministic defect centers in wide bandgap materials using FIB implantation.