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Novel SiGe Coherent Island Coarsening: Ostwald Ripening, Elastic Interactions, and Coalescence

Floro, Jerrold A.

Real-time measurements of island coarsening during SiGe/Si (001) deposition reveal unusual kinetics. In particular, the mean island volume increases superlinearly with time, while the areal density of islands decreases at a faster-than-linear rate. Neither observation is consistent with standard considerations of Ostvvald ripening. We attribute our observed kinetics to the effect of elastic interactions in the densely growing island array. Island coalescence likely plays an important role as well.