Publications Details

Publications / Conference

Novel applications of the field ion microscope and atom-probe

Kellogg, G.L.

Introduced in 1951 and 1966 respectively, the field ion microscope and atom-probe mass spectrometer can hardly be considered new or emerging microprobes. Over the years, the ability to use these instruments to examine the structure and composition of various materials at the atomic level has been well established. However,recent advances in more conventional microanalytical techniques, particularly progress toward a higher degree of spatial resolution, has created renewed interest in all techniques capable of analysis on a very fine scale. Also, there has been an increased emphasis over the past several years in the application of the field ion microscope and atom-probe to problems of greater general interest in surface and materials science. It is therefore not totally inappropriate to discuss the field ion microscope and atom-probe within the context of ''emerging'' microprobes. The intent of this paper is to familiarize the reader with the techniques of field ion microscopy and atom-probe mass spectroscopy and describe several recent applications which demonstrate some of their unique attributes. 45 refs., 8 figs.