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Microstructural development in solution-derived PZT thin films

Headley, Thomas J.

Lead zirconate titanate (PZT) thin films are of technological interest for a variety of electronic and optical applications. Fabrication of PZT films by solution deposition techniques is attractive because of stoichiometric control at the molecular level, ease of processing, and both low capital investment and total cost. Control of phase evolution, microstructure, crystallite size and orientation, and ferroelectric domain assemblage during processing is essential to optimize electrical and/or optical properties of the films. Electron microscopy techniques have been used extensively to correlate microstructural features with film processing.