Publications Details

Micromechanical characterization of near-surface layers

Bourcier, R.J.

This paper reviews several techniques available to the experimenter to characterize the mechanical properties of near surface layers of engineering materials. The test methods examined are: micro-tensile testing, bulge testing, ultra-low load indentation testing, and microfabricated test structures. The applicability of these techniques as well as their advantages and difficulties are examined. Special emphasis is given to recent developments in ultra-low load indentation testing and microfabricated test structures. 61 refs., 2 figs.