Publications Details
Micromachined silicon-based analytical microinstruments for space science and planetary exploration
For future planetary science missions, the authors are developing a series of microinstruments using the techniques of silicon-based micromachining. Conventional instruments such as chemical sensors, charged particle analyzers and mass spectrometers are reduced in size and effective volume to the dimension of cubic centimeters, while maintaining or enhancing performance. Using wafer/wafer bonding techniques, selective chemical etching, thin Film growth, and high resolution lithography, complex three dimensional structures can be assembled. This paper discusses the design, implementation and performance of two new instruments: The Micromachined Bessel Box Auger Electron Spectrometer, and the Mars Soil Chemistry Experiment (MOx).