Publications Details
Micromachined sensors and actuators
Micromachining is a rapidly growing field which allows for the fabrication of extremely small sensors and actuators using many of the techniques common to microelectronics. Two methods are commonly used: bulk micromachining, which involves the sculpting of single crystal silicon, and surface micromachining, which uses etched thin films that have been deposited on the substrate. Sensors are the primary commercial application, but microactuators are being actively researched at several laboratories and universities. Sandia National Laboratories is pursuing applications of both bulk and surface micromachining for silicon microsensors, microactuators, and high-performance, silicon packages for microelectronics. 3 figs.