Publications Details

Micromachined sensor and actuator research at Sandia`s Microelectronics Development Laboratory

Smith, J.H.

An overview of surface micromachining projects at the Microelectronics Development Laboratory of Sandia National Laboratories is presented. Development efforts are underway for a variety of surface micromachined sensors and actuators. A technology that embeds micromechanical devices below the surface of the wafer prior to microelectronics fabrication has also been developed for integrating microelectronics with surface micromachined micromechanical devices.