Publications Details
Metal oxide coatings for piezoelectric exhaust gas sensors
We have deposited ZrO{sub 2}, TiO{sub 2}, and SnO{sub 2} films on ST-cut quartz surface acoustic wave (SAW) devices via sol-gel techniques. The films range from 100 to 300 nm thick and have porosities after calcination at 300{degrees}C that range from 82-88 % for ZrO{sub 2}, 77-81% for TiO{sub 2}, and 57-66% for SnO{sub 2}. In all cases, we have varied the synthesis and processing parameters over a wide range to optimize film properties: metal ion concentration (0.05-1.0 M), the H{sub 2}O:metal ratio (0.3-5.3), the acid concentration in the sol (0.02-0.7 M), the modifier ligand:metal ratio (r = 0.0-1.0), the processing conditions (100-900{degrees}C). The modifier ligand, triethanolamine (TEA), is added to each solution to allow multilayer films to be made crack free. The multilayer films are studied by optical microscopy, ellipsometry, X-ray diffraction, and N{sub 2} sorption. Preliminary high temperature frequency response measurements to target gases, such as, H{sub 2}, NO, NO{sub 2}, and propylene indicate limited sensitivity for the configurations tested.