Publications Details

Light emission microscopy

Soden, J.M.; Cole Jr., E.I.

Light emission microscopy is now currently used in most integrated circuit (IC) failure analysis laboratories. This tutorial is designed to benefit both novice and experienced failure analysts by providing an introduction to light emission microscopy as well as information on new techniques, such as the use of spectral signatures. The use of light emission for accurate identification and spatial localization of physical defects and failure mechanisms is presented. This includes the analysis of defects such as short circuits which do not themselves emit light. The importance of understanding the particular IC design and applying the correct electrical stimulus is stressed. A video tape is used to show light emission from pn junctions, MOS transistors, test structures, and CMOS ICs in static and dynamic electrical stimulus conditions. 27 refs.