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Publications Details

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Ion Beam Implantation for Nanofabrication and Modification

Bielejec, Edward S.

Abstract not provided.

Additional Metadata

SAND Number

SAND2021-5378C

Date Published

April 1, 2021

Research Partner

Sandia National Laboratories, New Mexico

Links

DOI
OSTI

DOI

10.2172/1866719

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