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Influence of Plasma Species on the Growth Mode and Material Properties of Indium Nitride Grown by Plasma-Assisted Atomic Layer Epitaxy

Woodward, J.M.; Rosenberg, Samantha G.; Boris, D.R.; Johnson, S.D.; Robinson, Z.R.; Mastro, M.A.; Ludwig, K.F.; Eddy Jr., C.R.; Hite, J.K.

Abstract not provided.