Publications Details
Hydrogen diffusion and passivation in InGaAlN alloys
Hydrogen is found to readily diffuse into InGaN, InAlN and InGaAlN epitaxial layers during plasma exposures at 170-250{degree}C for 40 sec-30 min. The diffusivity of hydrogen is > 10{sup -11} cm{sup 2} {center_dot} s{sup -1} at 170{degree}C, and the native donor species are passivated by association with the hydrogen. Reactivation of these species occurs at 450-500{degree}C, but the hydrogen remains in the material until {ge} 800{degree}C.