Publications Details
Highly uniform and reproducible vertical-cavity surface-emitting lasers grown by metallorganic chemical vapor deposition
Metallorganic chemical vapor deposition (MOCVD) technology is increasingly recognised as a superior platform for growth of vertical-cavity surface-emitting lasers (VCELs) because of its high throughput, low surface defect density, continuous compositional grading control, and the flexibility for materials and dopant choices. In this paper, it is shown that it is also capable of extremely high wafer uniformity and run-to-run reproducibility.