Publications Details
High-spatial-resolution x-ray microanalysis: comparison of experiment and incoherent scattering calculations
The article presents the use of Monte Carlo simulations or incoherent scattering model to calculate profiles from precipitates embedded at different depths in thin specimens and then compared the simulations with experimental data measured from embedded particles. Incoherent scattering models is believed to be the best simulation for spatial resolution for x ray microanalysis in the AEM.